文摘
We demonstrated solution-processed thin film transistors on a peroxo-zirconium oxide (ZrO2) dielectric with a maximum temperature of 350 掳C. The formation of ZrO2 films was investigated by TG-DTA, FT-IR, and XPS analyses at various temperatures. We synthesized a zirconium oxide solution by adding hydrogen peroxide (H2O2). The H2O2 forms peroxo groups in the ZrO2 film producing a dense-amorphous phase and a smooth surface film. Because of these characteristics, the ZrO2 film successfully blocked leakage current even in annealing at 300 掳C. Finally, to demonstrate that the ZrO2 film is dielectric, we fabricated thin-film transistors (TFTs) with a solution-processed channel layer of indium zinc oxide (IZO) on ZrO2 films at 350 掳C. These TFTs had a mobility of 7.21 cm2/(V s), a threshold voltage (Vth) of 3.22 V, and a Vth shift of 1.6 V under positive gate bias stress.
Keywords:
solution process; peroxo-zirconium; thin-film transistor; hydrogen peroxide; indium zinc oxide; zirconium oxide