Knocking Down Highly-Ordered Large-Scale Nanowire Arrays

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• 作者：Alexander Pevzner ; Yoni Engel ; Roey Elnathan ; Tamir Ducobni ; Moshit Ben-Ishai ; Koteeswara Reddy ; Nava Shpaisman ; Alexander Tsukernik ; Mark Oksman ; Fernando Patolsky
• 刊名：Nano Letters
• 出版年：2010
• 出版时间：April 14, 2010
• 年：2010
• 卷：10
• 期：4
• 页码：1202-1208
• 全文大小：444K
• 年卷期：v.10,no.4(April 14, 2010)
• ISSN：1530-6992

文摘

The large-scale assembly of nanowire elements with controlled and uniform orientation and density at spatially well-defined locations on solid substrates presents one of the most significant challenges facing their integration in real-world electronic applications. Here, we present the universal “knocking-down” approach, based on the controlled in-place planarization of nanowire elements, for the formation of large-scale ordered nanowire arrays. The controlled planarization of the nanowires is achieved by the use of an appropriate elastomer-covered rigid-roller device. After being knocked down, each nanowire in the array can be easily addressed electrically, by a simple single photolithographic step, to yield a large number of nanoelectrical devices with an unprecedented high-fidelity rate. The approach allows controlling, in only two simple steps, all possible array parameters, that is, nanowire dimensions, chemical composition, orientation, and density. The resulting knocked-down arrays can be further used for the creation of massive nanoelectronic-device arrays. More than million devices were already fabricated with yields over 98% on substrate areas of up, but not limited to, to 10 cm².