In Situ Curing of Sliding SU-8 Droplet over a Microcontact Printed Pattern for Tunable Fabrication of a Polydimethylsiloxane Nanoslit
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- 作者：Chang-Beom Kim ; Honggu Chun ; JaeHun Chung ; Kwang Ho Lee ; Jeong Hoon Lee ; Ki-Bong Song ; Sang-Hoon Lee
- 刊名：Analytical Chemistry
- 出版年：2011
- 出版时间：September 15, 2011
- 年：2011
- 卷：83
- 期：18
- 页码：7221-7226
- 全文大小：844K
- 年卷期：v.83,no.18(September 15, 2011)
- ISSN：1520-6882
文摘
A tunable process for polydimethylsiloxane (PDMS) nanoslit fabrication is developed for nanofluidic applications. A microcontact printing (渭CP) of a laterally spreading self-assembled hexadecanethiol (HDT) layer, combined with in situ curing of a sliding SU-8 droplet, enables precise and independent tuning of a nanoslit-mold width and height using a single 渭CP master mold. The SU-8 nanoslit-mold is replicated using a hard鈥搒oft composite PDMS to prevent channel collapse at low (<0.2) aspect ratio (height over width). The fluidic characteristics as well as dimensions of nanoslits fabricated with various conditions are analyzed using a fluorescein sample and AFM images. Finally, concentration polarization-based sample preconcentration is successfully demonstrated at the nanoslit boundary where an electric double-layer is overlapped.