Programmable Direct-Printing Nanowire Electronic Components

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• 作者：Tae Il Lee ; Won Jin Choi ; Kyeong Ju Moon ; Ji Hyuk Choi ; Jyoti Prakash Kar ; Sachindra Nath Das ; Youn Sang Kim ; Hong Koo Baik ; Jae Min Myoung
• 刊名：Nano Letters
• 出版年：2010
• 出版时间：March 10, 2010
• 年：2010
• 卷：10
• 期：3
• 页码：1016-1021
• 全文大小：494K
• 年卷期：v.10,no.3(March 10, 2010)
• ISSN：1530-6992

文摘

In order for recently developed advanced nanowire (NW) devices¹⁻⁵ to be produced on a large scale, high integration of the separately fabricated nanoscale devices into intentionally organized systems is indispensible. We suggest a unique fabrication route for semiconductor NW electronics. This route provides a high yield and a large degree of freedom positioning the device on the substrate. Hence, we can achieve not only a uniform performance of Si NW devices with high fabrication yields, suppressing device-to-device variation, but also programmable integration of the NWs. Here, keeping pace with recent progress of direct-writing circuitry,⁶⁻⁸ we show the flexibility of our approach through the individual integrating, along with the three predesigned N-shaped sites. On each predesigned site, nine bottom gate p-type Si NW field-effect transistors classified according to their on-current level are programmably integrated.