Structure and Electrochemical Properties of Carbon Films Prepared by a Electron Cyclotron Resonance Sputtering Method
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- 作者：Jianbo Jia ; Dai Kato ; Ryoji Kurita ; Yukari Sato ; Kenichi Maruyama ; Koji Suzuki ; Shigeru Hirono ; Toshihiro Ando ; Osamu Niwa
- 刊名：Analytical Chemistry
- 出版年：2007
- 出版时间：January 1, 2007
- 年：2007
- 卷：79
- 期：1
- 页码：98 - 105
- 全文大小：219K
- 年卷期：v.79,no.1(January 1, 2007)
- ISSN：1520-6882
文摘
This paper describes the characterization, electrochemicalproperties, and applications of carbon films prepared bythe electron cyclotron resonance (ECR) sputtering method.The ECR-sputtered carbon film was deposited withinseveral minutes at room temperature. The optimizedsputtering conditions significantly change the film structure, which includes many more sp3 bonds (sp3/sp2 =0.702) than previously reported film (sp3/sp2 = 0.274)1with an extremely flat surface (0.7 Å). The ECR-sputteredcarbon films exhibit excellent electrochemical properties.For example, they have nearly the same potential windowin the positive direction as that of high-quality, boron-doped diamond (moderately doped, 1019-1020 boronatoms/cm3)2 and an even wider potential window in thenegative direction with a low background current, highstability, and suppression of fouling by electroactivespecies without pretreatment. The electron-transfer ratesat ECR-sputtered carbon films are similar to those ofglassy carbon (GC) for Ru(NH3)62+/3+ and Fe(CN)63-/4-,whereas they are much slower than those of GC forFe2+/3+, dopamine oxidation, and O2 reduction due toweak interactions between electroactive species and theECR-sputtered carbon film surface. Such a response canbe attributed to the ultraflat surface and low surface O/Cratios of ECR-sputtered carbon films. ECR-sputteredcarbon film is advantageous for measuring biochemicalswith high oxidation potentials because of its wide potentialwindow and high stability. Highly reproducible and well-defined cyclic voltammograms were obtained for histamine and azide ions with a peak potential at 1.25 and1.12 V vs Ag/AgCl, respectively. The film is very stablefor continuous voltammetry measurements in 10 
Mbisphenol A, which usually fouls the electrode surfacewith oxidation products.
Mbisphenol A, which usually fouls the electrode surfacewith oxidation products.