Nanoscale Patterning of Organosilane Molecular Thin Films from the Gas Phase and Its Applications: Fabrication of Multifunctional Surfaces and Large Area Molecular Templates for Site-Selective Materia

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• 作者：Antony George ; Mato Knez ; Gregor Hlawacek ; Dani毛l Hagedoorn ; Hein H. J. Verputten ; Raoul van Gastel ; Johan E. ten Elshof
• 刊名：Langmuir
• 出版年：2012
• 出版时间：February 7, 2012
• 年：2012
• 卷：28
• 期：5
• 页码：3045-3052
• 全文大小：592K
• 年卷期：v.28,no.5(February 7, 2012)
• ISSN：1520-5827

文摘

A simple methodology to fabricate micrometer- and nanometer-scale patterned surfaces with multiple chemical functionalities is presented. Patterns with lateral dimensions down to 110 nm were made. The fabrication process involves multistep gas-phase patterning of amine, thiol, alkyl, and fluorinated alkyl-functional organosilane molecules using PDMS molds as shadow masks. Also, a combination process of channel diffused plasma etching of organosilane molecular thin films in combination with masked gas-phase deposition to fabricate multilength scale, multifunctional surfaces is demonstrated.