High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching

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• 作者：Behzad Khanaliloo ; Matthew Mitchell ; Aaron C. Hryciw ; Paul E. Barclay
• 刊名：Nano Letters
• 出版年：2015
• 出版时间：August 12, 2015
• 年：2015
• 卷：15
• 期：8
• 页码：5131-5136
• 全文大小：356K
• ISSN：1530-6992

文摘

Optical microcavities enhance light鈥搈atter interactions and are essential for many experiments in solid state quantum optics, optomechanics, and nonlinear optics. Single crystal diamond microcavities are particularly sought after for applications involving diamond quantum emitters, such as nitrogen vacancy centers, and for experiments that benefit from diamond鈥檚 excellent optical and mechanical properties. Light鈥搈atter coupling rates in experiments involving microcavities typically scale with Q/V, where Q and V are the microcavity quality-factor and mode-volume, respectively. Here we demonstrate that microdisk whispering gallery mode cavities with high Q/V can be fabricated directly from bulk single crystal diamond. By using a quasi-isotropic oxygen plasma to etch along diamond crystal planes and undercut passivated diamond structures, we create monolithic diamond microdisks. Fiber taper based measurements show that these devices support TE- and TM-like optical modes with Q > 1.1 脳 10⁵ and V < 11(位/n) ³ at a wavelength of 1.5 渭m.