Top-down Approach for the Direct Synthesis, Patterning, and Operation of Artificial Micromuscles on Flexible Substrates

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• 作者：Ali Maziz ; Cédric Plesse ; Caroline Soyer ; Eric Cattan ; Frédéric Vidal
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2016
• 出版时间：January 27, 2016
• 年：2016
• 卷：8
• 期：3
• 页码：1559-1564
• 全文大小：513K
• ISSN：1944-8252

文摘

Recent progress in the field of microsystems on flexible substrates raises the need for alternatives to the stiffness of classical actuation technologies. This paper reports a top-down process to microfabricate soft conducting polymer actuators on substrates on which they ultimately operate. The bending microactuators were fabricated by sequentially stacking layers using a layer polymerization by layer polymerization of conducting polymer electrodes and a solid polymer electrolyte. Standalone microbeams thinner than 10 μm were fabricated on SU-8 substrates associated with a bottom gold electrical contact. The operation of microactuators was demonstrated in air and at low voltage (±4 V).