High-Speed Planar GaAs Nanowire Arrays with fmax > 75 GHz by Wafer-Scale Bottom-up Growth

详细信息查看全文

作者：Xin Miao ; Kelson Chabak ; Chen Zhang ; Parsian K. Mohseni ; Dennis Walker ; Jr. ; Xiuling Li
刊名：Nano Letters
出版年：2015
出版时间：May 13, 2015
年：2015
卷：15
期：5
页码：2780-2786
全文大小：409K
ISSN：1530-6992

文摘

YPE HTML>ylesheet" type="text/css" href="/templates/jsp/css/jquery-ui-1.10.2/base/jquery-ui.min.css"/> High-Speed Planar GaAs Nanowire Arra<font color="red">y</font>s with fmax > 75 GHz b<font color="red">y</font> Wafer-Scale Bottom-up Growth - Nano Letters (ACS Publications) ype" content="text/html; charset=UTF-8" /> yle-Type" content="text/css"/> ys with fmax > 75 GHz by Wafer-Scale Bottom-up Growth" />Xin Miao" />ys with 鈭?00% yield and precisely defined positions are realized via a patterned vapor鈥搇iquid鈥搒olid (VLS) growth method. Long and uniform planar GaAs NWs were assembled in perfectly parallel arrays to form double-channel T-gated NW array-based high electron mobility transistors (HEMTs) with DC and RF performance surpassing those for all field-effect transistors (FETs) with VLS NWs, carbon nanotubes (CNTs), or graphene channels in-plane with the substrate. For a planar GaAs NW array-based HEMT with 150 nm gate length and 2 V drain bias, the on/off ratio (ION/IOFF), cutoff frequency (fT), and maximum oscillation frequency (fmax) are 104, 33, and 75 GHz, respectively. By characterizing more than 100 devices on a 1.5 脳 1.5 cm2 chip, we prove chip-level electrical uniformity of the planar NW array-based HEMTs and verify the feasibility of using this bottom-up planar NW technology for post-Si large-scale nanoelectronics." />y" />ype" content="rapid-communication" />ywords" content="Bottom-up, VLS, nanowire, III鈭扸, transistor, VLSI" />ype="application/atom+xml" href="http://dx.doi.org/10.1021%2Fnl503596j"/>ype="application/rdf+json" href="http://dx.doi.org/10.1021%2Fnl503596j"/>ype="application/unixref+xml" href="http://dx.doi.org/10.1021%2Fnl503596j"/> yle.css" rel="stylesheet" type="text/css" />yle2/style.css" rel="stylesheet" type="text/css" />yle type="text/css">yle> yle2/_achs/favicon.ico" /> ylesheet" type="text/css" media="print" href="/templates/jsp/_style2/_achs/css/atypon-print.css" /> y='fb:app_id' />ype='text/css' />yle type="text/css">/* Page not found list spacing - added 7/16/14 by fc */div.errorBlock ul { padding: 0.25em 0 0 2em;}/* End page not found list spacing *//* journal top box font color - added 7/3/14 by fc */.series-info .series-info__about .series-links { color: #444444;}/* end journal top box font color *//* audioBoxWrap remove border - added 6/23/14 by fc */.audioBoxWrap { border: none;}.reduceBottomMargin { margin-bottom: 2px;}/* end audioBoxWrap *//* Follow ACS Mobile Updates - added April 8 by vp */#textArea #follow-pane-mobile img#mobile-group { clear: left; float: left; margin-bottom: 3em; width: 407px;}#textArea #follow-pane-mobile .mobile { clear: none; float: left; width: 42%;}#textArea #follow-pane-mobile a.mobile-button { clear: none; display: block; float: left; width: 147px;}#textArea #follow-pane-mobile .widget { clear: none; float: left; margin-right: 3%; width: 45%;}#follow-tabs ul li.mobile a { background-position: -649px 0;}#follow-tabs ul li.mobile a.current { background-position: -649px -62px;}#follow-tabs ul li.mobile:hover { height: 62px; top: -0;}/* end Follow ACS Mobile *//* Updated font color in footer */#pageFooter-wrap.partners h3 { color: #296595; }/*Removes CAS Section*/div.collectionInfo {display: none;}yle>yle type="text/css">.JCESubscriptionMessage { display: none; }yle>yle type="text/css">.viewMoreLess h3 { margin-bottom: 6px; }.viewMoreContent, .viewMore, .viewLess { display: none; }.viewMore, .viewLess { font-weight: bold; }.viewMoreContent.selected, .viewMore.selected, .viewLess.selected { display: block; }yle>yle type="text/css">div#mobileDevicePairing_login {background: #fff; margin: 7px; padding: 10px; width: 963px; border: 1px solid #ccc; font-size: 0.8em;}div#mobileDevicePairing_login ol {margin-left: 25px;}div#mobileDevicePairing_login .field {padding-bottom: 3px;} div#mobileDevicePairing_login .personLogin label, div#mobileDevicePairing_login .emailLogin label {margin-right: 3px;}div#mobileDevicePairing_login .emailLogin {display: none;}yle>yle type="text/css">div#sideCol div.twitter {margin-bottom: 5px;}div#sideCol div.twitter a.twitter-timeline { display: inline-block;width: 155px;padding: 2px 3px 0 22px;border: #ccc solid 1px;border-radius: 3px;background: #f8f8f8 url(//platform.twitter.com/images/bird.png) 2px 3px no-repeat;background: url(//platform.twitter.com/images/bird.png) 2px 3px no-repeat, -webkit-linear-gradient(#fff, #dedede);background: url(//platform.twitter.com/images/bird.png) 2px 3px no-repeat, linear-gradient(#fff, #dedede);background-size: 16px 13px, auto auto;/* Text */font: bold 11px/17px Helvetica, Arial, sans-serif;text-decoration: none;color: #333;text-shadow: 0 1px 0 rgba(255, 255, 255, .5);white-space: nowrap;overflow: hidden;}yle> y class="journal article pod"> yle="text-decoration: none; border: none;">