Influence of the Cation Ratio on Optical and Electrical Properties of Amorphous Zinc-Tin-Oxide Thin Films Grown by Pulsed Laser Deposition

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• 作者：Sofie Bitter ; Peter Schlupp ; Michael Bonholzer ; Holger von Wenckstern ; Marius Grundmann
• 刊名：ACS Combinatorial Science
• 出版年：2016
• 出版时间：April 11, 2016
• 年：2016
• 卷：18
• 期：4
• 页码：188-194
• 全文大小：394K
• 年卷期：0
• ISSN：2156-8944

文摘

Continuous composition spread (CCS) methods allow fast and economic exploration of composition dependent properties of multielement compounds. Here, a CCS method was applied for room temperature pulsed laser deposition (PLD) of amorphous zinc-tin-oxide to gain detailed insight into the influence of the zinc-to-tin cation ratio on optical and electrical properties of this ternary compound. Our CCS approach for a large-area offset PLD process utilizes a segmented target and thus makes target exchange or movable masks in the PLD chamber obsolete. Cation concentrations of 0.08–0.82 Zn/(Zn + Sn) were achieved across single 50 × 50 mm² glass substrates. The electrical conductivity increases for increasing tin content, and the absorption edge shifts to lower energies. The free carrier concentration can be tuned from 10²⁰ to 10¹⁶ cm^–3 by variation of the cation ratio from 0.1 to 0.5 Zn/(Zn + Sn).