Fabrication of Arrays of Lead Zirconate Titanate (PZT) Nanodots via Block Copolymer Self-Assembly
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- 作者：Justin Varghese ; Tandra Ghoshal ; Nitin Deepak ; Colm O鈥橰egan ; Roger W. Whatmore ; Michael A. Morris ; Justin D. Holmes
- 刊名：Chemistry of Materials
- 出版年：2013
- 出版时间：April 23, 2013
- 年：2013
- 卷：25
- 期：8
- 页码：1458-1463
- 全文大小：451K
- 年卷期：v.25,no.8(April 23, 2013)
- ISSN：1520-5002
文摘
This Article presents a simple methodology for the fabrication of two-dimensional arrays of lead zirconate titanate (PZT) nanodots on n-doped Si substrates via the directed self-assembly of PS-b-PEO block copolymer templates. The approach produces highly ordered PZT nanodot patterns, with lateral widths and heights as small as 20 and 10 nm, respectively, and a coverage density as high as 68 脳 109 nanodots cm鈥?. The existence of a perovskite phase in the nanodots was confirmed by X-ray diffraction and X-ray photoelectron spectroscopy. The piezo-amplitude and ferroelectric domain response obtained from the nanodots, through piezoresponse force microscopy, confirmed the presence of ferroelectricity in the PZT arrays. Notably, PZT nanodots with a thickness 10 nm, which is close to the critical size limit of PZT, showed ferroelectric behavior. The presence of a multi-a/c domain structure in the nanodots was attributed to their polycrystalline nature.