Fabrication of Silver Patterns on Polyimide Films Based on Solid-Phase Electrochemical Constructive Lithography Using Ion-Exchangeable Precursor Layers
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- 作者：Kensuke Akamatsu ; Yurina Fukumoto ; Tomoki Taniyama ; Takaaki Tsuruoka ; Hiroshi Yanagimoto ; Hidemi Nawafune
- 刊名：Langmuir
- 出版年：2011
- 出版时间：October 4, 2011
- 年：2011
- 卷：27
- 期：19
- 页码：11761-11766
- 全文大小：843K
- 年卷期：v.27,no.19(October 4, 2011)
- ISSN：1520-5827
文摘
We report a fully additive-based electrochemical approach to the site-selective deposition of silver on a polyimide substrate. Using a cathode coated with ion-doped precursor polyimide layers, patterns of metal masks used as anodes were successfully reproduced at the cathode鈥損recursor interface through electrochemical and ion-exchange reactions, which resulted in the generation of silver patterns on the polyimide films after subsequent annealing and removal from the substrate. Excellent interfacial adhesion was achieved through metal nanostructures consisting of interconnecting silver nanoparticles at the metal鈥損olymer interface, which are electrochemically grown 鈥渋n鈥?the precursor layer. This approach is a resist- and etch-free process and thus provides an effective methodology toward lower-cost and high-throughput microfabrication.