Atomic Beam-Induced Fluorination of Polyimide and Its Application to Site-Selective Cu Metallization

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• 作者：Masahito Tagawa ; Ken-ichi Maeda ; Tadashi Kajita ; Kumiko Yokota ; Kensuke Akamatsu ; Hidemi Nawafune
• 刊名：Langmuir
• 出版年：2007
• 出版时间：November 6, 2007
• 年：2007
• 卷：23
• 期：23
• 页码：11351 - 11354
• 全文大小：233K
• 年卷期：v.23,no.23(November 6, 2007)
• ISSN：1520-5827

文摘

Metallization methods of polyimide by hyperthermal atomic oxygen and atomic fluorine beams were developed.An atomic fluorine beam with a translational energy of 6.2 eV modified the wettability of polyimide surfaces to providean advancing water contact angle of 132. It was confirmed that in-air storage for 2 months did not alter the hydrophobicproperty created by the atomic fluorine beam. This stable beam-induced surface fluorination technique was thenapplied to site-selective electroless Cu plating on polyimide. It was demonstrated that changing the exposure sequencecould create both positive- and negative-type plating processes.