Order-Sorting Filters for a Grating Spectrometer and Multichannel Detection System: Application to Real-Time Spectroscopic Ellipsometry

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• 作者：Yeon-Taik Kim and and Ilsin An
• 刊名：Analytical Chemistry
• 出版年：1998
• 出版时间：April 1, 1998
• 年：1998
• 卷：70
• 期：7
• 页码：1346 - 1351
• 全文大小：124K
• 年卷期：v.70,no.7(April 1, 1998)
• ISSN：1520-6882

文摘

A multichannel detection system with a grating spectrometer was employed for rapid spectroscopic ellipsometrymeasurements. Although a grating spectrometer is convenient for dispersing light, it suffers from overlappingorders. Here, we developed novel techniques toeliminateoverlapping orders of spectra from a reflection grating.First, an optical filter is properly positioned inthemeasurement system. Second, a numerical filter isdeveloped. A monochromatic source was used to deducethe exact amount of the overlapping orders, which weredetermined as the irradiance ratio of the second- to thefirst-order diffraction. The ratios were found to beincreased from 5 to 11% in the 1.5-2.5 eV region. Weused the values to correct for overlapping irradianceusingthe numerical filter. Finally, second-order reflectioninreal-time rotating element spectroellipsograms were corrected using the filters developed in this work.