In this article, we investigate electrical transport properties in ultrathin body (UTB) MoS
2 two-dimensional (2D) crystals with c
hannel lengths ranging from 2 渭m down to 50 nm. We compare the short c
hannel behavior of sets of MOSFETs with various c
hannel thickness, and reveal the superior immunity to short c
hannel effects of MoS
2 transistors. We observe no obvious short c
hannel effects on the device with 100 nm c
hannel length (
Lch) fabricated on a 5 nm thick MoS
2 2D crystal even when using 300 nm thick SiO
2 as gate dielectric, and has a current on/off ratio up to 10
9. We also observe the on-current saturation at short c
hannel devices with continuous scaling due to the carrier velocity saturation. Also, we reveal the performance limit of short c
hannel MoS
2 transistors is dominated by the large contact resistance from the Schottky barrier between Ni and MoS
2 interface, where a fully transparent contact is needed to achieve a high-performance short c
hannel device.
Keywords:
MoS2; MOSFET; hannel+effects&qsSearchArea=searchText">short channel effects; contact resistance