Photoinduced Crystal-to-Liquid Phase Transitions of Azobenzene Derivatives and Their Application in Photolithography Processes through a Solid鈥揕iquid Patterning

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• 作者：Yasuo Norikane ; Emi Uchida ; Satoko Tanaka ; Kyoko Fujiwara ; Emiko Koyama ; Reiko Azumi ; Haruhisa Akiyama ; Hideyuki Kihara ; Masaru Yoshida
• 刊名：Organic Letters
• 出版年：2014
• 出版时间：October 3, 2014
• 年：2014
• 卷：16
• 期：19
• 页码：5012-5015
• 全文大小：323K
• ISSN：1523-7052

文摘

The direct and reversible transformation of matter between the solid and liquid phases by light at constant temperature is of great interest because of its potential applications in various manufacturing settings. We report a simple molecular design strategy for the phase transitions: azobenzenes having para-dialkoxy groups with a methyl group at the meta-position. The photolithography processes were demonstrated using the azobenzene as a photoresist in a single process combining development and etching of a copper substrate.