文摘
An experimental study of the decomposition of methane and carbon dioxide using capacitive RFdischarge was investigated over a moderate range of pressures (5-60 Torr). The decompositionof methane and carbon dioxide molecules is caused by direct electron collision via excitation ofthe unstable electronic state. Mechanisms of dissociation of methane and carbon dioxide byelectron impact were proposed and the conversions of each gas were derived from the proposedmechanisms. As a result, the conversion of each gas only depended on the specific energy of themolecules. The energy costs for the decomposition of methane and carbon dioxide could bedetermined through the experimental data. The major gaseous products of the decompositionof methane were hydrogen and C2 and/or C3 compounds. In the case of methane, some differentreaction mechanisms were observed on the range of input power, and a small amount of filmdeposition inside the reactor by polymerization was observed at high input power. Carbonmonoxide was mainly produced from the decomposition of carbon dioxide.