Self-Structured Conductive Filament Nanoheater for Chalcogenide Phase Transition

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• 作者：Byoung Kuk You ; Myunghwan Byun ; Seungjun Kim ; Keon Jae Lee
• 刊名：ACS Nano
• 出版年：2015
• 出版时间：June 23, 2015
• 年：2015
• 卷：9
• 期：6
• 页码：6587-6594
• 全文大小：627K
• ISSN：1936-086X

文摘

Ge₂Sb₂Te₅-based phase-change memories (PCMs), which undergo fast and reversible switching between amorphous and crystalline structural transformation, are being utilized for nonvolatile data storage. However, a critical obstacle is the high programming current of the PCM cell, resulting from the limited pattern size of the optical lithography-based heater. Here, we suggest a facile and scalable strategy of utilizing self-structured conductive filament (CF) nanoheaters for Joule heating of chalcogenide materials. This CF nanoheater can replace the lithographical-patterned conventional resistor-type heater. The sub-10 nm contact area between the CF and the phase-change material achieves significant reduction of the reset current. In particular, the PCM cell with a single Ni filament nanoheater can be operated at an ultralow writing current of 20 渭A. Finally, phase-transition behaviors through filament-type nanoheaters were directly observed by using transmission electron microscopy.