Fabrication of Gas Nanosensors and Microsensors via Local Anodic Oxidation

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• 作者：Braulio S. Archanjo ; Guilherme V. Silveira ; Alem-Mar B. Goncalves ; Diego C. B. Alves ; Andre S. Ferlauto ; Rodrigo G. Lacerda ; Bernardo R. A. Neves
• 刊名：Langmuir
• 出版年：2009
• 出版时间：January 6, 2009
• 年：2009
• 卷：25
• 期：1
• 页码：602-605
• 全文大小：172K
• 年卷期：v.25,no.1(January 6, 2009)
• ISSN：1520-5827

文摘

A nanosensor and microsensor fabrication method employing scanning probe microscopy (SPM) is demonstrated. Within such process, nano- or microscale metal oxide (MoO_x or TiO_x) structures, constituting the active region of a sensor, are directly fabricated onto a microscopic metal track via SPM-assisted local anodic oxidation (LAO). Two distinct LAO routes, a slow (conventional) or a fast (unusual) one, are employed to produce nano- and microsensors, which are tested at different temperatures using CO₂ and H₂ as test gases. Sensitivities down to ppm levels are demonstrated, and the possibility of easy integration into microfabrication processes is also discussed.