High-κ Dielectric Sol−Gel Hybrid Materials Containing Barium Titanate Nanoparticles

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• 作者：Jina Chon ; Saemi Ye ; Kyoung Jin Cha ; Seong Chul Lee ; Yong Sung Koo ; Jong Hoon Jung ; Yong Ku Kwon
• 刊名：Chemistry of Materials
• 出版年：2010
• 出版时间：October 12, 2010
• 年：2010
• 卷：22
• 期：19
• 页码：5445-5452
• 全文大小：975K
• 年卷期：v.22,no.19(October 12, 2010)
• ISSN：1520-5002

文摘

Novel high-κ thin composite films with excellent breakdown strength were synthesized using nonhydrolytic sol−gel processing. Organic−inorganic hybrid materials with high electronic polarizability were prepared as the matrix material to form a covalently bonded interface with the organically modified barium titanate (TBT) nanoparticles through a chemical cross-linking reaction. To enhance the dispersion stability of barium titanate (BT) nanoparticles in the matrix, the chemical nature of their surfaces was modified using diethyl 3-(trimethoxysilyl)propyl phosphonate (TMSP), which was synthesized by the Michaelis−Arbuzov reaction of chloropropyltrimethoxysilane (CPTMS) with 3-triethyl phosphate (TEP). A high degree of dispersion of the dielectric BT nanoparticles significantly improved the dielectric properties of the final composite films. Because the matrix consists of both silane and halogenated bisphenol A moieties with high electronic polarizability, adjusting the chemical composition allowed tailoring of the dielectric and film properties of the final composite materials.