Photocatalytic Micropatterning of Transparent Ethylsilsesquioxane-Titania Hybrid Films
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- 作者：Atsunori Matsuda ; Teruyuki Sasaki ; Kiyoharu Tadanaga ; Masahiro Tatsumisago ; and Tsutomu Minami
- 刊名：Chemistry of Materials
- 出版年：2002
- 出版时间：June 2002
- 年：2002
- 卷：14
- 期：6
- 页码：2693 - 2700
- 全文大小：360K
- 年卷期：v.14,no.6(June 2002)
- ISSN：1520-5002
文摘
Refractive index of ethylsilsesquioxane-titania hybrid films increased from 1.50 to 1.55accompanied by a decrease in film thickness by about 30% after UV light irradiation. Thecontact angle for water of the films decreased from 95
to about 45 and the dynamic hardnessincreased with UV irradiation. These changes in physical and chemical properties of thefilms with UV irradiation were caused by the cleavage of silicon-carbon bonds andelimination of ethyl groups in the films due to the photocatalytic effect of the titaniacomponent. Micropatterning was successfully performed on the films coated on the substratesby UV irradiation through a photomask.
to about 45 and the dynamic hardnessincreased with UV irradiation. These changes in physical and chemical properties of thefilms with UV irradiation were caused by the cleavage of silicon-carbon bonds andelimination of ethyl groups in the films due to the photocatalytic effect of the titaniacomponent. Micropatterning was successfully performed on the films coated on the substratesby UV irradiation through a photomask.