A three-
dimensional (3D) variant of scanning micro X-rayfluorescence (XRF) is
describe
d an
d evaluate
d at theID18F instrument of the European Synchrotron Ra
diationFacility (ESRF). The metho
d is base
d on confocal excitation/
detection using a polycapillary half-lens in front ofthe energy-
dispersive
detector. The experimental arrangement represents a significant generalization of regular two-
dimensional (2D) scanning micro-XRF an
d employs a
detector half-lens whose focus coinci
des with that of thefocuse
d incoming beam. The
detection volume
define
d bythe intersection of the exciting beam an
d the energy-
depen
dent acceptance of the polycapillary optics is 100-350
![](/images/entities/mgr.gif)
m
3. Minimum
detection limits are sub-ppm, an
dsensitivities are comparable with regular scanning XRF.Next to the re
duction of in-sample single/multiple scattering, the setup provi
des the possibility of sample
depthscans with an energy-
depen
dent resolution of 10-35
![](/images/entities/mgr.gif)
min the energy range of 3-23 keV an
d the possibility ofperforming 3D-XRF analysis by simple XYZ linear scanning. This provi
des a suitable alternative to X-ray fluorescence tomography. The metho
d is illustrate
d with resultsof the analysis of soli
d inclusions in
diamon
d an
d flui
dinclusions in quartz.