文摘
We report here plasma-induced formation of Ag nanostructures for surface-enhanced Raman scattering (SERS)applications. An array of uniform Ag patterned structures of 150 nm diameter was first fabricated on a silicon substratewith imprint lithography; then the substrate was further treated with an oxygen plasma to fracture the patternedstructures into clusters of smaller, interconnected, closely packed Ag nanoparticles (20-60 nm) and redeposited Agnanodots (~10 nm) between the clusters. The substrate thus formed had a uniform ultrahigh SERS enhancement factor(1010) over the entire substrate for 4-mercaptophenol molecules. By comparison, Au patterned structures fabricatedwith the same method did not undergo such a morphological change after the plasma treatment and showed noenhancement of Raman scattering.