Synthesis and Characterization of Diorganohydrazido(2–) Tungsten Complexes

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• 作者：J&#xfc ; rgen Koller ; Hiral M. Ajmera ; Khalil A. Abboud ; Timothy J. Anderson ; Lisa McElwee-White
• 刊名：Inorganic Chemistry
• 出版年：2008
• 出版时间：June 2, 2008
• 年：2008
• 卷：47
• 期：11
• 页码：4457 - 4462
• 全文大小：1083K
• 年卷期：v.47,no.11(June 2, 2008)
• ISSN：1520-510X

文摘

Diorganohydrazido(2–) complexes of tungsten (L)Cl₄W(NNR₂) [R₂ = Me₂, Ph₂, –(CH₂)₅–; L = CH₃CN, pyridine] were synthesized by reacting the corresponding 1,1-diorganohydrazine with WCl₆, followed by reaction with acetonitrile or pyridine. Crystallographic structure determination of (CH₃CN)Cl₄W(NNMe₂) and (CH₃CN)Cl₄W(NNPh₂) allows a comparison of the structural features of the diorganohydrazido(2–) functionality with varying substituents. Mass spectrometry, thermogravimetric analysis, and preliminary chemical vapor deposition experiments were performed to determine the viability of these complexes as single-source precursors for deposition of WN_x and WN_xC_y films.