Regular Arrays of Monodisperse Platinum/Erbium Disilicide Core-Shell Nanowires and Nanoparticles on Si(001) via a Self-Assembled Template

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• 作者：Jiun Pyng You ; Ju H. Choi ; Sehun Kim ; Xuema Li ; R. Stanley Williams ; Regina Ragan
• 刊名：Nano Letters
• 出版年：2006
• 出版时间：September 2006
• 年：2006
• 卷：6
• 期：9
• 页码：1858 - 1862
• 全文大小：399K
• 年卷期：v.6,no.9(September 2006)
• ISSN：1530-6992

文摘

We have developed a process for fabricating monodisperse noble metal/rare earth disilicide core-shell nanoparticles and nanowires in regulararrays on Si(001) with a density of 5 × 10¹⁰ / cm², and over areas >1 mm². Pt deposited via physical vapor deposition on a self-assembled rareearth disilicide nanowire template combined with reactive ion etching produces arrays of nanostructures. SEM images demonstrate the abilityto select nanowires or nanoparticles as a function of Pt coverage. Statistical analysis of images of Pt nanoparticle arrays yield a mean featuresize of 8 nm with a size variation of ±0.9 nm and interparticle spacing of approximately 15 nm.