Detection of Femtomolar Concentrations of HF Using an SiO2 Microcantilever

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• 作者：Yanjun Tang ; Ji Fang ; Xiaohe Xu ; Hai-Feng Ji ; Gilbert M. Brown ; and Thomas Thundat
• 刊名：Analytical Chemistry
• 出版年：2004
• 出版时间：May 1, 2004
• 年：2004
• 卷：76
• 期：9
• 页码：2478 - 2481
• 全文大小：103K
• 年卷期：v.76,no.9(May 1, 2004)
• ISSN：1520-6882

文摘

Femtomolar concentrations of hydrogen fluoride, a decomposition component of nerve agents, were detectedusing a SiO₂ microcantilever. The microcantilever underwent bending due to the reaction of HF with SiO₂. Themicrocantilever deflection increased as the concentrationof HF increased. Other acids, such as HCl, had no effecton the deflection of the cantilever. The mechanism ofreaction-induced bending and the correlation of microcantilever deflection with the HF concentration are discussed. The deflection in response to HF of a commercially available silicon cantilever was also studied, and itsresponse was compared with that of the SiO₂ cantilever.Much less bending amplitude and sensitivity were observed for the silicon cantilever.