Ultralong Single-Crystal Metallic Ni2Si Nanowires with Low Resistivity
详细信息 查看全文
- 作者：Yipu Song ; Andrew L. Schmitt ; Song Jin
- 刊名：Nano Letters
- 出版年：2007
- 出版时间：April 2007
- 年：2007
- 卷：7
- 期：4
- 页码：965 - 969
- 全文大小：415K
- 年卷期：v.7,no.4(April 2007)
- ISSN：1530-6992
文摘
Ultralong, single-crystal Ni2Si nanowires sheathed with amorphous silicon oxide were synthesized on a large scale by a chemical vaportransport (CVT) method, using iodine as the transport reagent and Ni2Si powder as the source material. Structural characterization usingpowder X-ray diffraction, electron microscopy, and energy-dispersive spectroscopy shows that the nanowires have Ni2Si-SiOx core-shellstructure with single-crystal Ni2Si core and amorphous silicon oxide shell. The oxide shell is electrically insulating and can be removed by HFetching. Four-terminal electrical measurements show that the single-crystal nanowire has extremely low resistivity of 21 
·cm and is capableof supporting remarkably high failure current density >108 A/cm2. These unique Ni2Si nanowires are very attractive nanoscale building blocksfor interconnects and fully silicided (FUSI) gate applications in nanoelectronics.
·cm and is capableof supporting remarkably high failure current density >108 A/cm2. These unique Ni2Si nanowires are very attractive nanoscale building blocksfor interconnects and fully silicided (FUSI) gate applications in nanoelectronics.