文摘
Hybrid organic鈥搃norganic sol鈥揼el dielectric thin films from a neat 2-cyanoethyltrimethoxysilane (CNETMS) precursor have been fabricated and their permittivity, dielectric strength, and energy density characterized. CNETMS sol鈥揼el films possess compact, polar cyanoethyl groups and exhibit a relative permittivity of 20 at 1 kHz and breakdown strengths ranging from 650 V/渭m to 250 V/渭m for film thicknesses of 1.3 to 3.5 渭m. Capacitors based on CNETMS films exhibit extractable energy densities of 7 J/cm3 at 300 V/渭m, as determined by charge鈥揹ischarge and polarization-electric field measurements, as well as an energy extraction efficiency of 91%. The large extractable energy resulting from the linear dielectric polarization behavior suggests that CNETMS films are promising sol鈥揼el materials for pulsed power applications.
Keywords:
sol鈭抔el dielectric; high k dielectric; high energy density materials; capacitors; electric breakdown strength; pulsed power applications