We present here a facile method for the preparation of TiO
2-based superhydrophobic surfaces. It consists of twosteps: (1) roughening of the TiO
2 surface with a rf (radio frequency) plasma with CF
4 as an etchant and (2) modificationof the roughened TiO
2 surface with an octadodecylphosphonic acid (ODP) monolayer. Plasma etching caused thethinning of the TiO
2 film but at the same time enhanced its surface roughness. A discontinuous wedgelike surfacemicrotexture was formed after etching for 30 s, which, after modification with a monolayer of ODP, showed Cassie-type water super-repellency with a contact angle (CA) hysteresis smaller than 2
. The state of water super-repellency(water CA >165
) could be converted to the state of superhydrophilicity (water CA ~0
) by means of ultraviolet (UV)illumination as a result of the photocatalytic decomposition of the ODP monolayer by TiO
2. Readsorption of ODPmolecules leads directly to the recovery of water super-repellency.