Highly Transparent Wafer-Scale Synthesis of Crystalline WS2 Nanoparticle Thin Film for Photodetector and Humidity-Sensing Applications

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• 作者：Amit S. Pawbake ; Ravindra G. Waykar ; Dattatray J. Late ; Sandesh R. Jadkar
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2016
• 出版时间：February 10, 2016
• 年：2016
• 卷：8
• 期：5
• 页码：3359-3365
• 全文大小：494K
• ISSN：1944-8252

文摘

In the present investigation, we report a one-step synthesis method of wafer-scale highly crystalline tungsten disulfide (WS<sub>2sub>) nanoparticle thin film by using a modified hot wire chemical vapor deposition (HW-CVD) technique. The average size of WS<sub>2sub> nanoparticle is found to be 25–40 nm over an entire 4 in. wafer of quartz substrate. The low-angle XRD data of WS<sub>2sub> nanoparticle shows the highly crystalline nature of sample along with orientation (002) direction. Furthermore, Raman spectroscopy shows two prominent phonon vibration modes of E<sup>1sup><sub>2gsub> and A<sub>1gsub> at ～356 and ～420 cm<sup>–1sup>, respectively, indicating high purity of material. The TEM analysis shows good crystalline quality of sample. The synthesized WS<sub>2sub> nanoparticle thin film based device shows good response to humidity and good photosensitivity along with good long-term stability of the device. It was found that the resistance of the films decreases with increasing relative humidity (RH). The maximum humidity sensitivity of 469% along with response time of ～12 s and recovery time of ～13 s were observed for the WS<sub>2sub> thin film humidity sensor device. In the case of photodetection, the response time of ～51 s and recovery time of ～88 s were observed with sensitivity ～137% under white light illumination. Our results open up several avenues to grow other transition metal dichalcogenide nanoparticle thin film for large-area nanoelectronics as well as industrial applications.