Inert Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced Deposits

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• 作者：Michael G. Stanford ; Brett B. Lewis ; Joo Hyon Noh ; Jason D. Fowlkes ; Philip D. Rack
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2015
• 出版时间：September 9, 2015
• 年：2015
• 卷：7
• 期：35
• 页码：19579-19588
• 全文大小：582K
• ISSN：1944-8252

文摘

Electron-beam-induced deposition patterns, with composition of PtC₅, were purified using a pulsed laser-induced purification reaction to erode the amorphous carbon matrix and form pure platinum deposits. Enhanced mobility of residual H₂O molecules via a localized injection of inert Ar鈥揌₂ (4%) is attributed to be the reactive gas species for purification of the deposits. Surface purification of deposits was realized at laser exposure times as low as 0.1 s. The ex situ purification reaction in the deposit interior was shown to be rate-limited by reactive gas diffusion into the deposit, and deposit contraction associated with the purification process caused some loss of shape retention. To circumvent the intrinsic flaws of the ex situ anneal process, in situ deposition and purification techniques were explored that resemble a direct write atomic layer deposition (ALD) process. First, we explored a laser-assisted electron-beam-induced deposition (LAEBID) process augmented with reactive gas that resulted in a 75% carbon reduction compared to standard EBID. A sequential deposition plus purification process was also developed and resulted in deposition of pure platinum deposits with high fidelity and shape retention.