Soft-Lithographic Approach to Functionalization and Nanopatterning Oxide-Free Silicon

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• 作者：Alexander A. Shestopalov ; Carleen J. Morris ; Briana N. Vogen ; Amanda Hoertz ; Robert L. Clark ; Eric J. Toone
• 刊名：Langmuir
• 出版年：2011
• 出版时间：May 17, 2011
• 年：2011
• 卷：27
• 期：10
• 页码：6478-6485
• 全文大小：1163K
• 年卷期：v.27,no.10(May 17, 2011)
• ISSN：1520-5827

文摘

We report a simple, reliable high-throughput method for patterning passivated silicon with reactive organic monolayers and demonstrate selective functionalization of the patterned substrates with both small molecules and proteins. The approach completely protects silicon from chemical oxidation, provides precise control over the shape and size of the patterned features in the 100 nm domain, and gives rapid, ready access to chemically discriminated patterns that can be further functionalized with both organic and biological molecules.