The Structure and Properties of Amorphous Indium Oxide

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• 作者：D. Bruce Buchholz ; Qing Ma ; Diego Alducin ; Arturo Ponce ; Miguel Jose-Yacaman ; Rabi Khanal ; Julia E. Medvedeva ; Robert P. H. Chang
• 刊名：Chemistry of Materials
• 出版年：2014
• 出版时间：September 23, 2014
• 年：2014
• 卷：26
• 期：18
• 页码：5401-5411
• 全文大小：710K
• ISSN：1520-5002

文摘

A series of In₂O₃ thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-to-crystalline transition and the structure of amorphous In₂O₃ were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InO_x polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structure鈥損roperty relationship.