Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

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• 作者：Joy Y. Cheng ; Daniel P. Sanders ; Hoa D. Truong ; Stefan Harrer ; Alexander Friz ; Steven Holmes ; Matthew Colburn ; William D. Hinsberg
• 刊名：ACS Nano
• 出版年：2010
• 出版时间：August 24, 2010
• 年：2010
• 卷：4
• 期：8
• 页码：4815-4823
• 全文大小：379K
• 年卷期：0
• ISSN：1936-086X

文摘

We report novel strategies to integrate block copolymer self-assembly with 193 nm water immersion lithography. These strategies employ commercially available positive tone chemically amplified photoresists to spatially encode directing information into precise topographical or chemical prepatterns for the directed self-assembly of block copolymers. Each of these methods exploits the advantageous solubility and thermal properties of polarity-switched positive tone photoresist materials. Precisely registered, sublithographic self-assembled structures are fabricated using these versatile integration schemes which are fully compatible with current optical lithography patterning materials, processes, and tooling.