Piezoelectric BaTiO3 Thin Film Nanogenerator on Plastic Substrates

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• 作者：Kwi-Il Park ; Sheng Xu ; Ying Liu ; Geon-Tae Hwang ; Suk-Joong L. Kang ; Zhong Lin Wang ; Keon Jae Lee
• 刊名：Nano Letters
• 出版年：2010
• 出版时间：December 8, 2010
• 年：2010
• 卷：10
• 期：12
• 页码：4939-4943
• 全文大小：384K
• 年卷期：v.10,no.12(December 8, 2010)
• ISSN：1530-6992

文摘

The piezoelectric generation of perovskite BaTiO₃ thin films on a flexible substrate has been applied to convert mechanical energy to electrical energy for the first time. Ferroelectric BaTiO₃ thin films were deposited by radio frequency magnetron sputtering on a Pt/Ti/SiO₂/(100) Si substrate and poled under an electric field of 100 kV/cm. The metal−insulator (BaTiO₃)−metal-structured ribbons were successfully transferred onto a flexible substrate and connected by interdigitated electrodes. When periodically deformed by a bending stage, a flexible BaTiO₃ nanogenerator can generate an output voltage of up to 1.0 V. The fabricated nanogenerator produced an output current density of 0.19 μA/cm² and a power density of 7 mW/cm³. The results show that a nanogenerator can be used to power flexible displays by means of mechanical agitations for future touchable display technologies.

Keywords:

BaTiO₃; thin film; piezoelectric; flexible electronics; nanogenerator; energy harvesting