文摘
We report the surface reaction that occurs in organic鈥搃norganic thin films using a hybrid deposition system that combines thermal evaporation (TE) and metalation processes. Growth of a smooth, uniform organic鈥搃norganic hybrid thin film was demonstrated, and the occurrence of a self-limited surface reaction between the organic semiconductor and the inorganic metal atom during the metalation process was confirmed with X-ray photoelectron spectroscopy and Raman analysis. In this study, we utilized a hybrid deposition system that combined TE and vapor-phase metalation to create an organic鈥搃norganic hybrid thin film. Experimental data and theoretical simulation of a model system are also provided to explain the barrierless reaction that occurs during synthesis of a zinc tetraphenylporphyrin thin film. This process can be utilized to increase the flexibility for the advanced synthesis of organic鈥搃norganic hybrid thin films.