Chip-Scale Nanofabrication of Single Spins and Spin Arrays in Diamond
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- 作者：David M. Toyli ; Christoph D. Weis ; Gregory D. Fuchs ; Thomas Schenkel ; David D. Awschalom
- 刊名：Nano Letters
- 出版年：2010
- 出版时间：August 11, 2010
- 年：2010
- 卷：10
- 期：8
- 页码：3168-3172
- 全文大小：392K
- 年卷期：v.10,no.8(August 11, 2010)
- ISSN：1530-6992
文摘
We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100-nm length scales. Secondary ion mass spectroscopy measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.