Pulse-Driven Micro Gas Sensor Fitted with Clustered Pd/SnO2 Nanoparticles
详细信息 查看全文
- 作者：Koichi Suematsu ; Yuka Shin ; Nan Ma ; Tokiharu Oyama ; Miyuki Sasaki ; Masayoshi Yuasa ; Tetsuya Kida ; Kengo Shimanoe
- 刊名：Analytical Chemistry
- 出版年：2015
- 出版时间：August 18, 2015
- 年：2015
- 卷：87
- 期：16
- 页码：8407-8415
- 全文大小：585K
- ISSN：1520-6882
文摘
Real-time monitoring of specific gas concentrations with a compact and portable gas sensing device is required to sense potential health risk and danger from toxic gases. For such purposes, we developed an ultrasmall gas sensor device, where a micro sensing film was deposited on a micro heater integrated with electrodes fabricated by the microelectromechanical system (MEMS) technology. The developed device was operated in a pulse-heating mode to significantly reduce the heater power consumption and make the device battery-driven and portable. Using clustered Pd/SnO2 nanoparticles, we succeeded in introducing mesopores ranging from 10 to 30 nm in the micro gas sensing film (area: 蠒 150 渭m) to detect large volatile organic compounds (VOCs). The micro sensor showed quick, stable, and high sensor responses to toluene at ppm (parts per million) concentrations at 300 掳C even by operating the micro heater in a pulse-heating mode where switch-on and -off cycles were repeated at one-second intervals. The high performance of the micro sensor should result from the creation of efficient diffusion paths decorated with Pd sensitizers by using the clustered Pd/SnO2 nanoparticles. Hence we demonstrate that our pulse-driven micro sensor using nanostructured oxide materials holds promise as a battery-operable, portable gas sensing device.