Photosensitive sol–gel preparation and micro-patterning of (100)-oriented (Ba0.7Sr0.3)TiO3 film on LaNiO3 electrode

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• 作者：1. Department of Materials Physics & Chemistry ; Xi’an University of Technology ; 710048 Xi’an ; People’s Republic of China2. Chemistry Section of Department of Pharmacy ; Forth Military Medical University ; 710032 Xi’an ; People’s Republic of China
• 关键词：BST – LaNiO3 – Sol–gel – Dielectric
• 刊名：Journal of Sol-Gel Science and Technology
• 出版年：2011
• 出版时间：July 2011
• 年：2011
• 卷：59
• 期：1
• 页码：164-168
• 全文大小：409.3 KB
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• 作者单位：http://www.springerlink.com/content/a7k6583657558450/
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Chemistry
  Ceramics,Glass,Composites,Natural Materials
  Inorganic Chemistry
  Optical and Electronic Materials
  Nanotechnology
  
• 出版者：Springer Netherlands
• ISSN：1573-4846

文摘

Using La(NO₃)₃·nH₂O and Ni(CH₃COO)₂·4H₂O as starting materials, the LaNiO₃ sol was prepared with 2-methoxyethanol as solvent. Using this sol, (001)-oriented LNO films with high conductivity were prepared on LaAlO₃ single crystal substrate by sol–gel method. Using barium acetate, strontium acetate, and Ti(OC₄H₉)₄ as starting materials, acetylacetone and lactic acid as chemical modifiers, photosensitive BST sol was obtained. Using the BST sol, a-oriented BST films were prepared on (001)LNO/LAO. Due to the photosensitivity of the BST sol, the coated BST gel film itself can be used as photoresist. Thus, micro-patterned a-oriented BST films are obtained by exposing, leaching, and annealing the BST gel film. The a-oriented BST film capacitor on LNO/LAO has a high dielectric constant, a low dielectric loss and a low leakage current.