Modeling the concentration profiles of aluminum and indium impurities in crystals of germanium–silicon solid solutions
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  • 作者:Z. A. Agamaliev ; Z. M. Zakhrabekova ; V. K. Kyazimova…
  • 关键词:controlled doping ; semiconductor materials
  • 刊名:Inorganic Materials
  • 出版年:2016
  • 出版时间:March 2016
  • 年:2016
  • 卷:52
  • 期:3
  • 页码:244-247
  • 全文大小:513 KB
  • 参考文献:1.Yonenaga, I., Czochralski growth of GeSi bulk alloy crystals, J. Cryst. Growth, 1999, vols. 198–199, pp. 404–408.CrossRef
    2.Yonenaga, I., Growth and fundamental properties of SiGe bulk crystals, J. Cryst. Growth, 2005, vol. 275, nos. 1–2, pp. 91–98.CrossRef
    3.Marin, C. and Ostrogorsky, A.G., Growth of Gadoped Ge0.98Si0.02 by vertical Bridgman method with a baffle, J. Cryst. Growth, 2000, vol. 211, nos. 1–4, pp. 378–383.CrossRef
    4.Abrosimov, N.V., Rossolenko, S.N., Thieme, W., et al., Czochralski growth of Si-and Ge-rich SiGe single crystals, J. Cryst, Growth, 1997, vol. 174, nos. 1–4, pp. 182–186.CrossRef
    5.Azhdarov, G.Kh., Kucukomeroglu, T., Varilci, A., et al., Distribution of components in Ge–Si bulk single crystals grown under the continuous feeding of the melt with the second component (Si), J. Cryst. Growth, 2001, vol. 226, no. 4, pp. 437–442.CrossRef
    6.Adachi, S., Ogata, Y., Koshikawa, N., et al., Homogeneous SiGe crystals grown by using the traveling liquidus-zone method, J. Cryst. Growth, 2005, vol. 280, nos. 3–4, pp. 372–377.CrossRef
    7.Nakajima, K., Kusunoki, T., Azuma, Y., et al., Compositional variation in Si-rich SiGe single crystals grown by multi-component zone melting method using Si seed and source crystals, J. Cryst. Growth, 2002, vol. 240, pp. 373–381.CrossRef
    8.Yildiz, M., Dost, S., and Lent, B., Growth of bulk SiGe single crystals by liquid phase diffusion, J. Cryst. Growth, 2005, vol. 280, pp. 151–160.CrossRef
    9.Schilz, J. and Romanenko, V.N., Bulk growth of silicon–germanium solid solutions, J. Mater. Sci.: Mater. Electron., 1995, vol. 6, pp. 265–279.
    10.Dold, P., Barz, A., Recha, S., et al., Growth and characterization of Ge1–x Six (x = 10 at. %) single crystals, J. Cryst. Growth, 1998, vol. 192, nos. 1–2, pp. 125–135.CrossRef
    11.Barz, A., Dold, P., Kerat, U., et al., Germanium-rich Si–Ge bulk single crystals grown by the vertical Bridgman method and by zone melting, J. Vac. Sci. Technol., B, 1998, vol. 16, pp. 1627–1630.CrossRef
    12.Yonenaga, I. and Ayuzava, T., Segregation coefficients of various dopants in SixGe1–x (0.93 < x < 0.96) single crystals, J. Cryst. Growth, 2006, vol. 297, pp. 14–19.CrossRef
    13.Kyazimova, V.K., Zeynalov, Z.M., Zakhrabekova, Z.M., and Azhdarov, G.Kh., Distribution of aluminum and indium impurities in crystals of Ge–Si solid solutions grown from the melt, Crystallogr. Rep., 2006, vol. 51, no. 1, pp. S192–S195.CrossRef
    14.Bok-Cheol Sim, Kwang Kim, and Hong-Woo Lee, Boron segregation control in silicon crystal ingots grown in Czochralski process, J. Cryst. Growth, 2006, vol. 290, pp. 665–669.CrossRef
    15.Zakhrabekova, Z.M., Zeinalov, Z.M., Kyazimova, V.K., and Azhdarov, G.Kh., Segregation of aluminum and indium impurities in Ge1–x Six crystals, Inorg. Mater., 2007, vol. 43, no. 1, pp. 3–7.CrossRef
    16.Azhdarov, G.Kh., Zeynalov, Z.M., and Huseynli, L.A., The distribution of Ga and Sb impurities in Ge–Si crystals grown by the Bridgman method using a feeding rod, Crystallogr. Rep., 2009, vol. 54, no. 1, pp. 150–153.CrossRef
    17.Azhdarov, G.Kh., Zeynalov, Z.M., Agamaliev, Z.A., and Kyazimova, A.I., Growth of single crystals of semiconductor solid solutions by double feeding of the melt method, Crystallogr. Rep., 2010, vol. 55, no. 4, pp. 716–719.CrossRef
    18.Glazov, V.M. and Zemskov, V.S., Fiziko-khimicheskie osnovy legirovaniya poluprovodnikov (Physicochemical Principles of Semiconductor Doping), Moscow: Nauka, 1967.
    19.Azhdarov, P.G. and Agaev, N.A., Component distribution in Ge–Si crystals grown from the melt, Inorg. Mater., 1999, vol. 35, no. 8, pp. 763–765.
  • 作者单位:Z. A. Agamaliev (1)
    Z. M. Zakhrabekova (1)
    V. K. Kyazimova (1)
    G. Kh. Azhdarov (1)

    1. Institute of Physics, Academy of Sciences of Azerbaijan, pr. Javida 33, Baku, AZ1143, Azerbaijan
  • 刊物类别:Chemistry and Materials Science
  • 刊物主题:Chemistry
    Inorganic Chemistry
    Industrial Chemistry and Chemical Engineering
    Materials Science
    Russian Library of Science
  • 出版者:MAIK Nauka/Interperiodica distributed exclusively by Springer Science+Business Media LLC.
  • ISSN:1608-3172
文摘
A one-dimensional problem of the axial distribution of Al and In impurities in uniform crystals of Ge–Si solid solutions grown by double feeding of the melt method has been solved in the Pfann approximation. The mathematical modeling results suggest that the impurity concentration profile in Ge–Si crystals of constant composition can be varied in a wide range through appropriate changes in the relationship between the crystal growth rate and the rates of feeding the melt using germanium and silicon rods. We demonstrate the possibility of growing completely homogeneous Ge–Si kAl,Inl crystals, in terms of both the concentrations of their major components and the impurity concentration profile.

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