Schottky barrier-based silicon nanowire pH sensor with live sensitivity control
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- 作者：Felix M. Z?rgiebel (1) (5)
Sebastian Pregl (1) (5)
Lotta R?mhildt (1)
J?rg Opitz (3)
W. Weber (2) (5)
T. Mikolajick (4) (5)
Larysa Baraban (1)
Gianaurelio Cuniberti (1) (5) - 关键词：silicon nanowires ; field effect transistor ; sub ; threshold regime ; nanosensors ; pH sensor ; bottom ; up fabrication ; maximum sensitivity of sensor
- 刊名：Nano Research
- 出版年：2014
- 出版时间：February 2014
- 年：2014
- 卷：7
- 期：2
- 页码：263-271
- 全文大小：1,035 KB
- 作者单位：Felix M. Z?rgiebel (1) (5)
Sebastian Pregl (1) (5)
Lotta R?mhildt (1)
J?rg Opitz (3)
W. Weber (2) (5)
T. Mikolajick (4) (5)
Larysa Baraban (1)
Gianaurelio Cuniberti (1) (5)
1. Institute for Materials Science and Max Bergmann Center of Biomaterials, TU Dresden, 01062, Dresden, Germany
5. Center for Advancing Electronics Dresden, TU Dresden, 01062, Dresden, Germany
3. Fraunhofer Institute IZFP Dresden, 01109, Dresden, Germany
2. NaMLab GmbH, 01187, Dresden, Germany
4. Institute for Semiconductors and Microsystems Technology, TU Dresden, 01187, Dresden, Germany - ISSN：1998-0000
文摘
We demonstrate a pH sensor based on ultrasensitive nanosize Schottky junctions formed within bottom-up grown dopant-free arrays of assembled silicon nanowires. A new measurement concept relying on a continuous gate sweep is presented, which allows the straightforward determination of the point of maximum sensitivity of the device and allows sensing experiments to be performed in the optimum regime. Integration of devices into a portable fluidic system and an electrode isolation strategy affords a stable environment and enables long time robust FET sensing measurements in a liquid environment to be carried out. Investigations of the physical and chemical sensitivity of our devices at different pH values and a comparison with theoretical limits are also discussed. We believe that such a combination of nanofabrication and engineering advances make this Schottky barrier-powered silicon nanowire lab-on-a-chip platform suitable for efficient biodetection and even for more complex biochemical analysis.