Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement

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• 作者：Pengfei Zhu ; Binghe Ma ; Chengyu Jiang ; Jinjun Deng…
• 刊名：Microsystem Technologies
• 出版年：2015
• 出版时间：April 2015
• 年：2015
• 卷：21
• 期：4
• 页码：785-789
• 全文大小：744 KB
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• 刊物类别：Engineering
• 刊物主题：Electronics, Microelectronics and Instrumentation
  Nanotechnology
  Mechanical Engineering
  Operating Procedures and Materials Treatment
  
• 出版者：Springer Berlin / Heidelberg
• ISSN：1432-1858

文摘

Drive current is an important parameter of thermal shear stress sensor. Increasing drive current is helpful for enhancing its sensitivity. However, there must be an allowable drive current for the sake of safe working temperature of the sensor. How to make full use of drive current to increase the sensor’s sensitivity working underwater was studied. If the allowable drive current in still water and the current in stream water are used to drive the sensor in lower and higher shear stress input ranges, respectively, sensitivity of the sensor will be enhanced with the sensor working under a safe temperature. The both currents were separately determined by analyzing I–V characteristic and output voltage-shear stress relationship. We can improve the sensor’s sensitivity from 11.8 to 27.5?mV/Pa when shear stress input was 0.4?Pa.