Fabrication and characterization of MEMS piezoelectric synthetic jet actuators with bulk-micromachined PZT thick film
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- 作者：Shushan Wang ; Binghe Ma ; Jinjun Deng ; Hongdong Qu ; Jian Luo
- 刊名：Microsystem Technologies
- 出版年：2015
- 出版时间：May 2015
- 年：2015
- 卷：21
- 期：5
- 页码：1053-1059
- 全文大小：1,453 KB
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Zheng K et al (2004) A novel wet etching process of Pb (Zr, Ti) O3 thin films for applications in microelectromechanical system. Jpn J Appl Phys 43(6S):3934View Article - 作者单位：Shushan Wang (1)
Binghe Ma (1)
Jinjun Deng (1)
Hongdong Qu (1)
Jian Luo (1)
1. Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an, 710072, Shaanxi, People’s Republic of China - 刊物类别：Engineering
- 刊物主题：Electronics, Microelectronics and Instrumentation
Nanotechnology
Mechanical Engineering
Operating Procedures and Materials Treatment - 出版者：Springer Berlin / Heidelberg
- ISSN：1432-1858
文摘
In this paper, we have developed a fabrication process for micro synthetic jet actuators (SJA) by bonding a high-quality Pb (Zr,Ti) O3 (PZT) ceramic wafer to a silicon wafer using epoxy resin at low temperature (<150?°C). The bulk-PZT was lapped and polished to be PZT thick film by chemical mechanical polishing (CMP) method, and patterned by wet-etching method. The cavity and orifice of SJA were formed by inductive coupled plasma etching (ICP) method. A MEMS piezoelectric SJA was then completed and characterized, including the performance of the PZT thick film. While the dimension of bonded PZT thick film is about 6,000?×?6,000?×?100?μm, and the dimension of Si membrane is about 1,000?×?1,000?×?20?μm. The experimental results show that the maximum center amplitude of PZT-Si diaphragm is 15.05?μm at Vp-p of 90?V and the resonant frequency of 5?kHz, and the maximum jet velocity is higher than 11?m/s. This novel process has great potential to fabricate MEMS piezoelectric synthetic jet actuators.