文摘
In this study, yttrium oxide (Y2O3) films were synthesized from a metal-ethylenediaminetetraacetic (metal-EDTA) complex by employing a H2-O2 combustion flame. A rotation apparatus and various cooling agents (compressed air, liquid nitrogen, and atomized purified water) were used during the synthesis to control the thermal history during film deposition. An EDTA·Y·H complex was prepared and used as the staring material for the synthesis of Y2O3 films with a flame-spraying apparatus. Although thermally extreme environments were employed during the synthesis, all of the obtained Y2O3 films showed only a few cracks and minor peeling in their microstructures. For instance, the Y2O3 film synthesized using the rotation apparatus with water atomization units exhibited a porosity of 22.8%. The maximum film’s temperature after deposition was 453 °C owing to the high heat of evaporation of water. Cooling effects of substrate by various cooling units for solidification was dominated to heat of vaporization, not to unit’s temperatures.