Electro-mechanical hybrid PLL for MEMS oscillator temperature compensation system

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• 作者：Jakub Gronicz ; Lasse Aaltonen…
• 关键词：MEMS resonator ; PLL ; TCF ; Tuning fork
• 刊名：Analog Integrated Circuits and Signal Processing
• 出版年：2016
• 出版时间：March 2016
• 年：2016
• 卷：86
• 期：3
• 页码：385-391
• 全文大小：6,515 KB
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  7.Chekurov, N., Aaltonen, L., Gronicz, J., Kosunen, M., Tittonen, I. (2010). Design and fabrication of a tuning fork shaped voltage controlled resonator with additional tuning electrodes for low-voltage applications. In Proceedings of eurosensors XXIV.
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  9.Gronicz, J., Chekurov, N., Kosunen, M., Tittonen, I. (2013). Design and fabrication of a tuning fork shaped voltage controlled resonator for low-voltage applications with additional tuning electrodes. Journal of Micromechanics and Microengineering 23(11), 115,004 (2013). 10.​1088/​0960-1317/​23/​11/​115004 . http://​iopscience.​iop.​org/​0960-1317/​23/​11/​115004
  10.Gronicz, J., Pulkkinen, M., Yücetas, M., Halonen, K. (2014). A 2 \({\rm {\mu}}\) A temperature compensated MEMS-based real time clock with \(\pm\) 4 ppm timekeeping accuracy. In 2014 IEEE international symposium on circuits and systems (ISCAS) (pp. 514–517). doi:10.​1109/​ISCAS.​2014.​6865185 .
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• 作者单位：Jakub Gronicz (1) (2)
  Lasse Aaltonen (1) (3)
  Nikolai Chekurov (1) (4)
  Kari Halonen (1)
  
  1. SMARAD-2, Department of Micro and Nanosciences, School of Electrical Engineering, Aalto University, Otakaari 5A, PO. Box 13000, Espoo, 02150, Finland
  2. ICsense NV, Leuven, Belgium
  3. Murata Electronics Oy, Vantaa, Finland
  4. Oxford Instruments Analytical, Espoo, Finland
  
• 刊物类别：Engineering
• 刊物主题：Circuits and Systems
  Electronic and Computer Engineering
  Signal,Image and Speech Processing
  
• 出版者：Springer Netherlands
• ISSN：1573-1979

文摘

This paper describes the design and measurement of a dual Phase-Locked Loop system that utilizes a MEMS VCO with a DC-controlled silicon resonator as the frequency-setting element. System-level considerations are given for the use of such structure in temperature compensation system for MEMS reference oscillators. Micromachining process and circuit design challenges of the particular implementation are also discussed. The PLL has been implemented using a 0.35 μm CMOS process and operates with a nominal supply of 3 V. The nominal supply voltage for the MEMS VCO is 24 V with 15 V bias applied to the silicon resonator. Keywords MEMS resonator PLL TCF Tuning fork