Structure and phase composition of deposited tantalum–carbon films
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- 作者：Yu. Zh. Tuleushev ; V. N. Volodin…
- 刊名：The Physics of Metals and Metallography
- 出版年：2016
- 出版时间：August 2016
- 年：2016
- 卷：117
- 期：8
- 页码：789-794
- 全文大小：694 KB
- 刊物类别：Chemistry and Materials Science
- 刊物主题：Chemistry
Metallic Materials
Russian Library of Science - 出版者：MAIK Nauka/Interperiodica distributed exclusively by Springer Science+Business Media LLC.
- ISSN：1555-6190
- 卷排序：117
文摘
Ion plasma sputtering and the subsequent codeposition of ultrafine tantalum and carbon particles were used to prepare coatings with 4.6–71.5 at % C. Structural studies of the coatings showed the existence of carbon solid solutions in β Ta at carbon contents to 4.6 at %, carbon solid solutions in α Ta at carbon contents of 4.6–10.3 at %, and direct synthesis of TaC at carbon contents of 44.7–71.5 at %. During heat treatments to 700°C, the substantial concentration widening of regions of the existence of Ta2C and TaC was found. The lattice parameters of hexagonal Ta2C and fcc TaC carbides were determined for composition ranges of the existence of phases during heating to 700°C. Upon heating above 600°C, the progressive transition of quasiamorphous Ta2C carbide into the crystalline Ta2C carbide was found to take place. The possibility of applying the direct synthesis of TaC carbide in engineering was noted.Keywordstantalumcarbonstructurefilmssize effectsolid solutionphase