Effect of oxygen flow rate on the electrical and optical characteristics of dopantless tin oxide films fabricated by low pressure chemical vapor deposition

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• 作者：Jun-Hyun Kim ; Hae-Min Lee ; Doo Won Kang…
• 关键词：LPCVD ; Dopantless ; Tin Oxide ; Sheet Resistance ; Optical Bandgap ; Figure of Merit
• 刊名：Korean Journal of Chemical Engineering
• 出版年：2016
• 出版时间：September 2016
• 年：2016
• 卷：33
• 期：9
• 页码：2711-2715
• 全文大小：648 KB
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Chemistry
  Industrial Chemistry and Chemical Engineering
  Catalysis
  Materials Science
  Biotechnology
  
• 出版者：Springer New York
• ISSN：1975-7220
• 卷排序：33

文摘

The effect of oxygen flow rate on the electrical and optical characteristics of dopantless tin oxide films prepared by low pressure chemical vapor deposition (LPCVD) was investigated. A decrease in the sheet resistance of the film with increasing oxygen flow rate in the range of 200-300 sccm was attributed to an increase in the film thickness (and correspondingly, in the grain size); while at oxygen flow rates higher than 300 sccm, the increase in the sheet resistance of the film resulted from an increase in the X-ray diffraction peak intensities of the (110), (101), and (201) planes. The optical bandgap of the film decreased when the oxygen flow rate was increased from 200 to 300 sccm, but it remained nearly constant for oxygen flow rates higher than 300 sccm. A maximum figure-of-merit was achieved for films prepared with an oxygen flow rate of 300 sccm.