Rapid fabrication of cylindrical microlens array by shaped femtosecond laser direct writing

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• 作者：Zhi Luo ; Cong Wang ; Kai Yin ; Xinran Dong ; Dongkai Chu ; Ji’an Duan
• 刊名：Applied Physics A: Materials Science & Processing
• 出版年：2016
• 出版时间：July 2016
• 年：2016
• 卷：122
• 期：7
• 全文大小：1,269 KB
• 刊物类别：Physics and Astronomy
• 刊物主题：Physics
  Condensed Matter
  Optical and Electronic Materials
  Nanotechnology
  Characterization and Evaluation Materials
  Surfaces and Interfaces and Thin Films
  Operating Procedures and Materials Treatment
  
• 出版者：Springer Berlin / Heidelberg
• ISSN：1432-0630
• 卷排序：122

文摘

In this study, a remarkable spatial shaping approach is proposed to transform Gaussian femtosecond laser into quasi-Bessel optical field with compressed central lobe and amplified side lobes of the spatial intensity profile. Based on this technique, inward bulge trench (IBT) structures are fabricated with high efficiency on the surface of PMMA by a single illumination step, whose cross-sectional profile is opposite to the results fabricated by Gaussian beam. And plano-convex cylindrical microlens array, which is consistent in size and shape throughout a large sample area, is formed through simply piecing together the IBT structures during fabricating process. Furthermore, numerical simulations of optical field in radial direction and on-axial direction are exploited to rationalize the dependence of the patterned microstructures on the spatial intensity distribution of femtosecond laser.