Influence of the Non-Uniformity of Surface Dielectric Film Thickness on Cathode Sputtering in a Glow Discharge
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- 作者：G. G. Bondarenko ; V. I. Kristya ; J. N. Tun
- 关键词：glow discharge ; dielectric film ; cathode sputtering
- 刊名：Russian Physics Journal
- 出版年：2016
- 出版时间：January 2016
- 年：2016
- 卷：58
- 期：9
- 页码：1313-1320
- 全文大小：200 KB
- 参考文献：1.J. P. Boeuf, J. Phys., D36, No. 6, R53–79 (2003).ADS
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6.V. I. Kristya, in: Glow Discharges and Tokamaks, S.A. Murphy, ed., Nova Science, New York (2010), pp. 329–368.
7.Yu. P. Raizer, Physics of a Gas Discharge [in Russian], Nauka, Moscow (1987).
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11.R. D. Aitov, A. P. Korzhavyi, and V. I. Kristya, Obzory Elektr. Tekh., Ser. 6, No. 5, 1–48 (1991). - 作者单位：G. G. Bondarenko (1)
V. I. Kristya (2)
J. N. Tun (2)
1. National Research University Higher School of Economics, Moscow, Russia
2. Bauman Moscow State Technical University, Kaluga Branch, Kaluga, Russia - 刊物类别：Physics and Astronomy
- 刊物主题：Physics
Physics
Applied Optics, Optoelectronics and Optical Devices
Condensed Matter
Nuclear Physics, Heavy Ions and Hadrons
Mathematical and Computational Physics
Russian Library of Science - 出版者：Springer New York
- ISSN：1573-9228
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