A study of distributed dielectric bragg reflectors for vertically emitting lasers of the near-IR range
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- 作者：S. A. Blokhin ; M. A. Bobrov ; A. G. Kuzmenkov ; A. A. Blokhin…
- 刊名：Technical Physics Letters
- 出版年：2016
- 出版时间：October 2016
- 年：2016
- 卷：42
- 期：10
- 页码：1049-1053
- 全文大小：513 KB
- 刊物类别：Physics and Astronomy
- 刊物主题：Physics
Mechanics, Fluids and Thermodynamics
Russian Library of Science - 出版者：MAIK Nauka/Interperiodica distributed exclusively by Springer Science+Business Media LLC.
- ISSN：1090-6533
- 卷排序：42
文摘
Studies aimed at optimization of the design of a dielectric distributed Bragg reflector (DBR) produced by the reactive magnetron sputtering method for applications in near-IR vertical-cavity surface-emitting lasers with intracavity contacts (ICC-VCSELs) are carried out. It is shown that the reflectivity of the dielectric DBRs based on SiO2/TiO2 decreases due to the polycrystalline structure of the TiO2 layers, which causes diffusive scattering of light. In contrast, amorphous Ta2O5 layers is characterized by a low surface roughness and low fluctuation in the refractive index. Single-mode ICC-VCSELs in the 980-nm spectral range with dielectric DBR based on SiO2/Ta2O5 with a threshold current less than 0.27 mA, electric resistance of less than 200 Ω, and differential efficiency of more than 0.8 W/A are demonstrated.